Тимофеев О. В., Вилкова Е. Ю.

89
5, 2010
681.3: 681.7.023.7
. .
, .
.
-
.
.
PACS: 81.05.-t
:
,
,
,
-
.
.
CVD-
-
.
.
,
,
-
,
,
—
.
-
.
.
-
.
0,0001 ).
(
).
-
.
. 1,
,
-
,
.
,
,
.
(
-
,
-
).
-
.
10
,
,
,
.
.
, 603950,
,
-75, .
. (831) 462-96-34. E-mail: timofeev@ihps.nnov.ru
15
. .,
.
.
,
.
2009 .
., 2010
, 49.
-
,
.
(
.
. 1).
90
5, 2010
-
1
.
,
HNO3
H2SO4
HCl
KMnO4—H2O—H2SO4
HNO3 : HClO4 (1:1)
NaOH
, /(
0,013
0,066
0,71
413,4
2178,1
0,0004
0,0013
0,004
0,010
0,018
0,060
0,380
0,205
0,125
0,122
1
2
5
10
15,75
13
18
6
10
—
2
2,5
5
7
10
2
)
,
:
.
.
[1].
-
,
.
-
.
70
,
,
.
,
. 1.
,
[2].
,
NaOH (2,5
HNO3 (2
. 1.
)
HNO3 (
)
HNO3 (5
,
)
)
91
5, 2010
4
–200
:
-
2,5
=
=
-
2,0
4
—
(
, 29
= 64—65
,
= 8,81),
,
,
lg
s
—
1/0.
2/1
3
,
-10-29
2
1,5
.
-
.
-
1
1,0
0,5
,
.
-
0,0
0
,
,
,
10
20
30
40
50
ZnSe
(
1—
3—2
;2—1
HNO3; 4 — 5
:
HNO3;
HNO3
1, 2 5
33, 55 88 %,
),
KUGLER KUI–6 (
0,1
0,633
,
,
).
"Axioplan-2"
.
.
.
,
-
-
.
-
,
-
1,
,
.
1:1
-
,
.
,
. 2,
,
.
,
.
4-
,
.
1—2
. 2.
,
-
,
10
11141-84.
,
80
1/0
,
-
[3].
1, 2, 5
70
. 2.
.
,
1
60
,
2
.3
.
,
.
-
.
,
92
5, 2010
2
CVD1/0
1
2
5
HNO3:2
HNO3
HNO3
HNO3
HClO4 (1:1
2
/(
)
11,3
12,4
20,4
28,3
20,0
.)
,
2
/(
)
8,2
13,3
14,2
16,6
20,0
,
2
/(
)
9,7
12,9
17,3
22,45
20,0
,
1,6
,
5
3-
1,4
.
2,5
1,2
4
3
1,0
3
,
2,0
2
2
,
0,8
1
1,5
1
0,6
0,4
1,0
0,2
0,5
0,0
0
10
20
30
40
50
60
70
,
. 4.
0,0
0
10
20
30
40
50
60
70
2/1
:
1 — 5 NaOH; 2 — 10 NaOH; 3 — 7 NaOH;
4—
; 5 — 2,5 NaOH
,
. 3.
ZnSe
1/0
1—1
3—
HNO3; 2 — 1
2
:
ZnSe
.4
2,5
1:1
-
,
,
.
,
(
10
,
,
HClO4;
-
)
.
,
,
[4, 5],
.
-
,
. 4.
.
-
93
5, 2010
,
-
,
2/1
,
5.
0,3
100
(
( N
. 5).
-
0,3)
-
.
1.
-
.
-
. 5.
,
100
.
2.
,
-
,
.
1.
. .,
. 1993.
1—2
3.
2.
.
,
200
.
,
3-
,
0,5
1
(0,5
N
1),
.
.
.,
7. . 775.
.,
. .//
. .,
3. . 16.
. .,
.
.
. .,
. 2006.
. 42.
3.
. .,
. .,
. .,
. .//
. 2005. 5. . 107.
4. Fujita S., Mimoto H., Takebe H., Noguchi T.//Journal of
Crystal Growth. 1979. V. 7. P. 326.
5. Hong S. K., Kim B. J., Kim M. D., Park G. S., Lee J. H.,
Park H. S., Yoon S. Y., Kim T. I.//Journal of Crystal Growth. 1997.
V. 181. P. 343.
Investigation of the process of chemical-mechanical polishing of zinc
selenide using the aqueous solutions of inorganic acids and bases
E. Ju. Vilkova, O.V. Timofeev
Institute of Chemistry of High-Purity Substances RAS, Nizhniy Novgorod, Russia
A process of chemical-mechanical polishing of zinc selenide is investigated using aqueous solutions of inorganic acids and bases of different concentrations as a chemically active component. On
the basis of the obtained results a technique for chemical-mechanical polishing of polycrystalline
zinc selenide is developed.
PACS: 81.05.-t
Keywords: polishing, zinc selenid, water solution, acid.
Bibliography — 5 references.
.//
Received October 15, 2009